Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592776 | Polishing composition for metal CMP | Shumin Wang, Steven Grumbine, Eric W. G. Hoglund | 2003-07-15 |
| 6582623 | CMP composition containing silane modified abrasive particles | Steven Grumbine, Shumin Wang | 2003-06-24 |