Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646348 | Silane containing polishing composition for CMP | Shumin Wang | 2003-11-11 |
| 6592776 | Polishing composition for metal CMP | Shumin Wang, Christopher C. Streinz, Eric W. G. Hoglund | 2003-07-15 |
| 6582623 | CMP composition containing silane modified abrasive particles | Christopher C. Streinz, Shumin Wang | 2003-06-24 |