Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662631 | Method and apparatus for characterization of porous films | Mikhail Baklanov, Konstantin Mogilnikov, Denis Shamiryan, Fedor Nikolaevich Dultsev | 2003-12-16 |
| 6664192 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2003-12-16 |
| 6635964 | Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof | Mikhail Baklanov, Serge Vanhaelemeersch | 2003-10-21 |
| 6593251 | Method to produce a porous oxygen-silicon layer | Mikhail Baklanov, Denis Shamiryan, Serge Vanhaelemeersch | 2003-07-15 |