Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662631 | Method and apparatus for characterization of porous films | Konstantin Mogilnikov, Karen Maex, Denis Shamiryan, Fedor Nikolaevich Dultsev | 2003-12-16 |
| 6635964 | Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof | Karen Maex, Serge Vanhaelemeersch | 2003-10-21 |
| 6593251 | Method to produce a porous oxygen-silicon layer | Denis Shamiryan, Karen Maex, Serge Vanhaelemeersch | 2003-07-15 |