Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664192 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen | 2003-12-16 |
| 6660660 | Methods for making a dielectric stack in an integrated circuit | Marko Tuominen | 2003-12-09 |
| 6534395 | Method of forming graded thin films using alternating pulses of vapor phase reactants | Christiaan J. Werkhoven, Ivo Raaijmakers | 2003-03-18 |