Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596973 | Pyrometer calibrated wafer temperature estimator | James Donald | 2003-07-22 |
| 6564810 | Cleaning of semiconductor processing chambers | Franciscus Bernardus Maria Van Bilsen | 2003-05-20 |
| 6544900 | In situ dielectric stacks | Christiaan J. Werkhoven | 2003-04-08 |
| 6540837 | Quartz wafer processing chamber | — | 2003-04-01 |
| 6534395 | Method of forming graded thin films using alternating pulses of vapor phase reactants | Christiaan J. Werkhoven, Suvi Haukka | 2003-03-18 |
| 6521503 | High temperature drop-off of a substrate | Paul Jacobson, Ravinder Aggarwal, Robert C. Haro | 2003-02-18 |
| 6511539 | Apparatus and method for growth of a thin film | — | 2003-01-28 |