Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6609869 | Transfer chamber with integral loadlock and staging station | James Kusbel | 2003-08-26 |
| 6592318 | Docking cart with integrated load port | — | 2003-07-15 |
| 6550158 | Substrate handling chamber | Allan Doley, Dennis L. Goodwin, Kenneth O'Neill, Gerben Vrijburg, David Rodriguez | 2003-04-22 |
| 6521503 | High temperature drop-off of a substrate | Paul Jacobson, Ivo Raaijmakers, Robert C. Haro | 2003-02-18 |