Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617247 | Method of processing a semiconductor wafer in a reaction chamber with a rotating component | — | 2003-09-09 |
| 6554905 | Rotating semiconductor processing apparatus | — | 2003-04-29 |
| 6550158 | Substrate handling chamber | Allan Doley, Kenneth O'Neill, Gerben Vrijburg, David Rodriguez, Ravinder Aggarwal | 2003-04-22 |