Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666924 | Reaction chamber with decreased wall deposition | — | 2003-12-23 |
| 6564810 | Cleaning of semiconductor processing chambers | Ivo Raaijmakers | 2003-05-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666924 | Reaction chamber with decreased wall deposition | — | 2003-12-23 |
| 6564810 | Cleaning of semiconductor processing chambers | Ivo Raaijmakers | 2003-05-20 |