Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664192 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Suvi Haukka | 2003-12-16 |
| 6599572 | Process for growing metalloid thin films utilizing boron-containing reducing agents | Ville Antero Saanila, Kai-Erik Elers, Sari Johanna Kaipio | 2003-07-29 |