Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664168 | Method of making an on-die decoupling capacitor for a semiconductor device | R. Scott List | 2003-12-16 |
| 6630390 | Method of forming a semiconductor device using a carbon doped oxide layer to control the chemical mechanical polishing of a dielectric layer | Clark H. Cummins | 2003-10-07 |
| 6624032 | Structure and process flow for fabrication of dual gate floating body integrated MOS transistors | Mohsen Alavi, Scott Thompson, Mark Bohr | 2003-09-23 |
| 6596646 | Method for making a sub 100 nanometer semiconductor device using conventional lithography steps | Alan M. Myers | 2003-07-22 |
| 6593650 | Plasma induced depletion of fluorine from surfaces of fluorinated low-k dielectric materials | Steven Towle, Lawrence Wong | 2003-07-15 |
| 6548399 | Method of forming a semiconductor device using a carbon doped oxide layer to control the chemical mechanical polishing of a dielectric layer | Clark H. Cummins | 2003-04-15 |
| 6518155 | Device structure and method for reducing silicide encroachment | Robert S. Chau, Mitch Taylor, Chia-Hong Jan, Julie Tsai | 2003-02-11 |
| 6506692 | Method of making a semiconductor device using a silicon carbide hard mask | — | 2003-01-14 |