Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593650 | Plasma induced depletion of fluorine from surfaces of fluorinated low-k dielectric materials | Steven Towle, Ebrahim Andideh | 2003-07-15 |
| 6566757 | Stabilization of low dielectric constant film with in situ capping layer | Indrajit Banerjee, Marnie L. Harker | 2003-05-20 |