Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566757 | Stabilization of low dielectric constant film with in situ capping layer | Lawrence Wong, Marnie L. Harker | 2003-05-20 |
| 6528865 | Thin amorphous fluorocarbon films | — | 2003-03-04 |