Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664168 | Method of making an on-die decoupling capacitor for a semiconductor device | Ebrahim Andideh | 2003-12-16 |
| 6661085 | Barrier structure against corrosion and contamination in three-dimensional (3-D) wafer-to-wafer vertical stack | Scot Kellar, Sarah Kim | 2003-12-09 |
| 6645832 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | Sarah Kim, Tom Letson | 2003-11-11 |