Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661085 | Barrier structure against corrosion and contamination in three-dimensional (3-D) wafer-to-wafer vertical stack | Scot Kellar, R. Scott List | 2003-12-09 |
| 6645832 | Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack | R. Scott List, Tom Letson | 2003-11-11 |
| 6599808 | Method and device for on-chip decoupling capacitor using nanostructures as bottom electrode | Scot Kellar | 2003-07-29 |