Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656369 | Method for fabricating a scanning probe microscope probe | Mark E. Lagus, Kevin S. Petrarca, James G. Ryan, Richard P. Volant | 2003-12-02 |
| 6597068 | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same | Kevin S. Petrarca, Donald F. Canaperi, Kenneth J. Stein, Richard P. Volant | 2003-07-22 |
| 6503834 | Process to increase reliability CuBEOL structures | Xiaomeng Chen, Judith M. Rubino, Carlos J. Sambucetti, Soon-Cheon Seo, James A. Tornello | 2003-01-07 |