Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621392 | Micro electromechanical switch having self-aligned spacers | Richard P. Volant, David Angell, Joseph T. Kocis, Kevin S. Petrarca, Kenneth J. Stein +1 more | 2003-09-16 |
| 6597068 | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same | Kevin S. Petrarca, Mahadevaiyer Krishnan, Kenneth J. Stein, Richard P. Volant | 2003-07-22 |
| 6524935 | Preparation of strained Si/SiGe on insulator by hydrogen induced layer transfer technique | Jack O. Chu, Christopher P. D'Emic, Lijuan Huang, John A. Ott, Hon-Sum Philip Wong | 2003-02-25 |