Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661069 | Micro-electromechanical varactor with enhanced tuning range | Anil K. Chinthakindi, Robert A. Groves, Seshadri Subbanna, Richard P. Volant | 2003-12-09 |
| 6635506 | Method of fabricating micro-electromechanical switches on CMOS compatible substrates | Richard P. Volant, John C. Bisson, Donna R. Cote, Timothy J. Dalton, Robert A. Groves +2 more | 2003-10-21 |
| 6635527 | Metal-insulator-metal capacitor | Nancy Anne Greco, David L. Harame, Gary Robert Hueckel, Joseph T. Kocis, Dominique Nguyen Ngoc | 2003-10-21 |
| 6621392 | Micro electromechanical switch having self-aligned spacers | Richard P. Volant, David Angell, Donald F. Canaperi, Joseph T. Kocis, Kevin S. Petrarca +1 more | 2003-09-16 |
| 6613641 | Production of metal insulator metal (MIM) structures using anodizing process | Richard P. Volant, John M. Cotte, Kevin S. Petrarca | 2003-09-02 |
| 6597068 | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same | Kevin S. Petrarca, Donald F. Canaperi, Mahadevaiyer Krishnan, Richard P. Volant | 2003-07-22 |