Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670228 | Method of fabricating a polysilicon capacitor utilizing FET and bipolar base polysilicon layers | Douglas D. Coolbaugh, Gregory G. Freeman | 2003-12-30 |
| 6661069 | Micro-electromechanical varactor with enhanced tuning range | Anil K. Chinthakindi, Robert A. Groves, Kenneth J. Stein, Richard P. Volant | 2003-12-09 |
| 6635506 | Method of fabricating micro-electromechanical switches on CMOS compatible substrates | Richard P. Volant, John C. Bisson, Donna R. Cote, Timothy J. Dalton, Robert A. Groves +2 more | 2003-10-21 |