Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664031 | Process for forming photoresist pattern by using gas phase amine treatment | Jae Chang Jung, Cha-Won Koh, Jin-Soo Kim, Keun Kyu Kong, Ki Ho Baik | 2003-12-16 |
| 6610616 | Method for forming micro-pattern of semiconductor device | Cha-Won Koh, Min Ho Jung, Jin-Soo Kim, Geun Su Lee, Jae Chang Jung | 2003-08-26 |
| 6602650 | Organic anti-reflective coating polymer, anti-reflective coating composition comprising the same and methods of preparation thereof | Min Ho Jung, Jae Chang Jung, Geun Su Lee, Ki Ho Baik | 2003-08-05 |
| 6599678 | Organic anti-reflective coating polymer, anti-reflective coating composition comprising the same and method of preparation thereof | Min Ho Jung, Jae Chang Jung, Geun Su Lee, Ki Ho Baik | 2003-07-29 |
| 6593446 | Organic polymer for organic anti-reflective coating layer and preparation thereof | Jae Chang Jung, Keun Kyu Kong, Min Ho Jung, Geun Su Lee, Ki Ho Baik | 2003-07-15 |
| 6582883 | Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof | Min Ho Jung, Jae Chang Jung, Geun Su Lee, Ki Ho Baik | 2003-06-24 |
| 6562925 | Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof | Min Ho Jung, Jae Chang Jung, Geun Su Lee, Ki Ho Baik | 2003-05-13 |
| 6548613 | Organic anti-reflective coating polymer and preparation thereof | Min Ho Jung, Jae Chang Jung, Geun Su Lee, Ki Ho Baik | 2003-04-15 |
| 6538090 | Organic anti-reflective polymer and method for manufacturing thereof | Min Ho Jung, Ki Ho Baik | 2003-03-25 |