Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583048 | Organosilicon precursors for interlayer dielectric films with low dielectric constants | Jean Louise Vincent, Mark Leonard O'Neill, Howard Paul Withers, Jr., Raymond Nicholas Vrtis | 2003-06-24 |
| 6534413 | Method to remove metal and silicon oxide during gas-phase sacrificial oxide etch | Eric Anthony ROBERTSON, III | 2003-03-18 |
| 6509266 | Halogen addition for improved adhesion of CVD copper to barrier | Ralph J. Ciotti, Eugene Joseph Karwacki, Jr. | 2003-01-21 |