Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583048 | Organosilicon precursors for interlayer dielectric films with low dielectric constants | Mark Leonard O'Neill, Howard Paul Withers, Jr., Scott Edward Beck, Raymond Nicholas Vrtis | 2003-06-24 |