Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602783 | Deposition of titanium amides | Matthias J. Jahl, Douglas W. Carson, Shantia Riahi | 2003-08-05 |
| 6583048 | Organosilicon precursors for interlayer dielectric films with low dielectric constants | Jean Louise Vincent, Mark Leonard O'Neill, Howard Paul Withers, Jr., Scott Edward Beck | 2003-06-24 |