Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583048 | Organosilicon precursors for interlayer dielectric films with low dielectric constants | Jean Louise Vincent, Mark Leonard O'Neill, Scott Edward Beck, Raymond Nicholas Vrtis | 2003-06-24 |
| 6514471 | Removing fluorine from semiconductor processing exhaust gas | Thomas Hsiao-Ling Hsiung | 2003-02-04 |