Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6637998 | Self evacuating micro environment system | John Giles Langan, Wayne Thomas McDermott | 2003-10-28 |
| 6572681 | Purification of gases | Timothy Christopher Golden, Alexander Schwarz, Fred William Taylor | 2003-06-03 |
| 6514471 | Removing fluorine from semiconductor processing exhaust gas | Howard Paul Withers, Jr. | 2003-02-04 |