Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518581 | Apparatus for control of gas flow into a mass spectrometer using a series of small orifices | Seksan Dheandhanoo, Suhas Narayan Ketkar, Richard Vincent Pearce | 2003-02-11 |
| 6509266 | Halogen addition for improved adhesion of CVD copper to barrier | Scott Edward Beck, Eugene Joseph Karwacki, Jr. | 2003-01-21 |