Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664554 | Self-cleaning optic for extreme ultraviolet lithography | Richard H. Stulen | 2003-12-16 |
| 6549264 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, William C. Replogle | 2003-04-15 |
| 6545745 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, William C. Replogle | 2003-04-08 |
| 6533952 | Mitigation of radiation induced surface contamination | Richard H. Stulen | 2003-03-18 |