Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6549264 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, Leonard E. Klebanoff | 2003-04-15 |
| 6545745 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, Leonard E. Klebanoff | 2003-04-08 |