Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642995 | Mask-to-wafer alignment system | William C. Sweatt, Daniel A. Tichenor | 2003-11-04 |
| 6561486 | Motorized support jack | Donald Joe Herron | 2003-05-13 |
| 6549264 | Extreme-UV lithography vacuum chamber zone seal | Donald Joe Herron, Leonard E. Klebanoff, William C. Replogle | 2003-04-15 |
| 6545745 | Extreme-UV lithography vacuum chamber zone seal | Donald Joe Herron, Leonard E. Klebanoff, William C. Replogle | 2003-04-08 |