Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6561486 | Motorized support jack | Steven J. Haney | 2003-05-13 |
| 6549264 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Leonard E. Klebanoff, William C. Replogle | 2003-04-15 |
| 6545745 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Leonard E. Klebanoff, William C. Replogle | 2003-04-08 |