Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664554 | Self-cleaning optic for extreme ultraviolet lithography | Leonard E. Klebanoff | 2003-12-16 |
| 6533952 | Mitigation of radiation induced surface contamination | Leonard E. Klebanoff | 2003-03-18 |