Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624930 | Illumination device for a DUV microscope and DUV microscope | Frank Eisenkrämer, Michael Veith, Wolfgang Vollrath, Martin Osterfeld | 2003-09-23 |
| 6618154 | Optical measurement arrangement, in particular for layer thickness measurement | Horst Engel, Hakon Mikkelsen, Matthias Slodowski, Kuno Backhaus, Joachim Wienecke | 2003-09-09 |
| 6600560 | Optical measurement arrangement having an ellipsometer | Hakon Mikkelsen, Horst Engel, Christof Stey | 2003-07-29 |