Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6618154 | Optical measurement arrangement, in particular for layer thickness measurement | Horst Engel, Hakon Mikkelsen, Lambert Danner, Matthias Slodowski, Joachim Wienecke | 2003-09-09 |