Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6618154 | Optical measurement arrangement, in particular for layer thickness measurement | Horst Engel, Lambert Danner, Matthias Slodowski, Kuno Backhaus, Joachim Wienecke | 2003-09-09 |
| 6600560 | Optical measurement arrangement having an ellipsometer | Horst Engel, Lambert Danner, Christof Stey | 2003-07-29 |