Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6618154 | Optical measurement arrangement, in particular for layer thickness measurement | Horst Engel, Hakon Mikkelsen, Lambert Danner, Matthias Slodowski, Kuno Backhaus | 2003-09-09 |
| 6504608 | Optical measurement arrangement and method for inclination measurement | Klaus Hallmeyer, Guenter Hoffmann | 2003-01-07 |