Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627304 | Absorbent thin-film system consisting of metal and dielectric films | — | 2003-09-30 |
| 6624930 | Illumination device for a DUV microscope and DUV microscope | Lambert Danner, Michael Veith, Wolfgang Vollrath, Martin Osterfeld | 2003-09-23 |