Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664547 | Ion source providing ribbon beam with controllable density profile | — | 2003-12-16 |
| 6664548 | Ion source and coaxial inductive coupler for ion implantation system | William F. DiVergilio | 2003-12-16 |
| 6541781 | Waveguide for microwave excitation of plasma in an ion beam guide | John Zheng Ye, William F. DiVergilio | 2003-04-01 |
| 6534775 | Electrostatic trap for particles entrained in an ion beam | Eric R. Harrington, Michael Graf, Robert D. Rathmell | 2003-03-18 |
| 6525326 | System and method for removing particles entrained in an ion beam | Eric R. Harrington, Jeffrey A. Burgess, John Zheng Ye | 2003-02-25 |