EH

Eric R. Harrington

AT Axcelis Technologies: 2 patents #13 of 51Top 30%
📍 Ipswich, MA: #1 of 13 inventorsTop 8%
🗺 Massachusetts: #830 of 6,881 inventorsTop 15%
Overall (2003): #68,594 of 273,478Top 30%
2
Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6534775 Electrostatic trap for particles entrained in an ion beam Victor M. Benveniste, Michael Graf, Robert D. Rathmell 2003-03-18
6525326 System and method for removing particles entrained in an ion beam Victor M. Benveniste, Jeffrey A. Burgess, John Zheng Ye 2003-02-25