Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541781 | Waveguide for microwave excitation of plasma in an ion beam guide | Victor M. Benveniste, William F. DiVergilio | 2003-04-01 |
| 6525326 | System and method for removing particles entrained in an ion beam | Eric R. Harrington, Victor M. Benveniste, Jeffrey A. Burgess | 2003-02-25 |