Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664548 | Ion source and coaxial inductive coupler for ion implantation system | Victor M. Benveniste | 2003-12-16 |
| 6653643 | Method and apparatus for improved ion acceleration in an ion implantation system | Kourosh Saadatmand | 2003-11-25 |
| 6653803 | Integrated resonator and amplifier system | Kourosh Saadatmand, Ernst F. Scherer | 2003-11-25 |
| 6635890 | Slit double gap buncher and method for improved ion bunching in an ion implantation system | Kourosh Saadatmand | 2003-10-21 |
| 6583429 | Method and apparatus for improved ion bunching in an ion implantation system | Kourosh Saadatmand | 2003-06-24 |
| 6541781 | Waveguide for microwave excitation of plasma in an ion beam guide | Victor M. Benveniste, John Zheng Ye | 2003-04-01 |