Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653643 | Method and apparatus for improved ion acceleration in an ion implantation system | William F. DiVergilio | 2003-11-25 |
| 6653803 | Integrated resonator and amplifier system | William F. DiVergilio, Ernst F. Scherer | 2003-11-25 |
| 6635890 | Slit double gap buncher and method for improved ion bunching in an ion implantation system | William F. DiVergilio | 2003-10-21 |
| 6608315 | Mechanism for prevention of neutron radiation in ion implanter beamline | Michael Graf, Edward K. McIntyre | 2003-08-19 |
| 6583429 | Method and apparatus for improved ion bunching in an ion implantation system | William F. DiVergilio | 2003-06-24 |