Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6585828 | Process chamber lid service system | Shinichi Kurita | 2003-07-01 |
| 6552297 | RF matching network with distributed outputs | Carl A. Sorensen | 2003-04-22 |
| 6534007 | Method and apparatus for detecting the endpoint of a chamber cleaning | James T. Gardner | 2003-03-18 |
| 6517303 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita +1 more | 2003-02-11 |