Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6554907 | Susceptor with internal support | Emanuel Beer | 2003-04-29 |
| 6517303 | Substrate transfer shuttle | John M. White, Norman L. Turner, Ernst Keller, Shinichi Kurita, Wendell T. Blonigan +1 more | 2003-02-11 |