Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6585828 | Process chamber lid service system | Wendell T. Blonigan | 2003-07-01 |
| 6577923 | Apparatus and method for robotic alignment of substrates | John M. White | 2003-06-10 |
| 6517303 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Wendell T. Blonigan +1 more | 2003-02-11 |