Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647993 | Surface-treated shower head for use in a substrate processing chamber | Quanyuan Shang, Sheng Sun, Kam S. Law | 2003-11-18 |
| 6554907 | Susceptor with internal support | Robin L. Tiner | 2003-04-29 |