Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647993 | Surface-treated shower head for use in a substrate processing chamber | Sheng Sun, Kam S. Law, Emanuel Beer | 2003-11-18 |
| 6610354 | Plasma display panel with a low k dielectric layer | Kam S. Law, Takako Takehara, Taekyung Won, William Harshbarger, Dan Maydan | 2003-08-26 |