Sheng Sun

AT Applied Komatsu Technology: 1 patents #2 of 13Top 20%

📍 Foster City, CA: #45 of 111 inventorsTop 45%

🗺 California: #8,996 of 28,521 inventorsTop 35%

Overall (2003): #118,817 of 273,478Top 45%

Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6647993	Surface-treated shower head for use in a substrate processing chamber	Quanyuan Shang, Kam S. Law, Emanuel Beer	2003-11-18