Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534007 | Method and apparatus for detecting the endpoint of a chamber cleaning | Wendell T. Blonigan | 2003-03-18 |
| 6508855 | Aerosol delivery apparatus for chemical reactions | Sujeet Kumar, Ronald M. Cornell, Ronald J. Mosso, Xiangxin Bi | 2003-01-21 |
| 6506493 | Metal oxide particles | Sujeet Kumar, Xiangxin Bi, Nobuyuki Kambe | 2003-01-14 |