Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627050 | Method and apparatus for depositing a tantalum-containing layer on a substrate | Peijun Ding, Howard H. Tang, Tony P. Chiang, Jianming Fu | 2003-09-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627050 | Method and apparatus for depositing a tantalum-containing layer on a substrate | Peijun Ding, Howard H. Tang, Tony P. Chiang, Jianming Fu | 2003-09-30 |