Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635157 | Electro-chemical deposition system | Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2003-10-21 |
| 6568896 | Transfer chamber with side wall port | Timothy Joseph Franklin | 2003-05-27 |
| 6503131 | Integrated platen assembly for a chemical mechanical planarization system | Timothy Joseph Franklin | 2003-01-07 |